Area Selective Deposition
Submission Deadline: September 9, 2024
This collection features recent discoveries in fundamentals of Area Selective Deposition (ASD) as well as advances in its technological applications.
Topics covered include, but are not limited to:
- mechanisms of thin film nucleation and growth
- controllable activation and/or suppression of nucleation
- small molecule inhibition
- bottom-up ASD patterning
- defect formation and mitigation
- combinations of deposition with selective etching
- surface characterization with emphasis on defects
- metrology for area-selective deposition
- all applications of ASD
Editors
Eray Aydil, New York University
Erwin Kessels, Eindhoven University of Technology
Guest Editors
Seán Barry, Carleton University
Paul Ragogna, Western University
Manuscript Details & Submission
Authors are encouraged to use the JVST article template. During submission, you will have an opportunity to indicate that your paper is a part of this collection by choosing the Special Topic or Conference Collection “Area Selective Deposition”.
Submission Deadline: September 9, 2024