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  • Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A

JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.

Upcoming Special Topics From Journal of Vacuum Science & Technology A

Past Topics

Atmospheric Plasma-Liquid Interfaces

Submission Deadline: May 25, 2022

The use of atmospheric pressure plasmas within or in contact with liquids has shown great promise in various fields of plasma science and technology. Physicochemical processes that occur at and…

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Thin Film Deposition for Materials Discovery

Submission Deadline: August 10, 2022

Historically, thin film growth has occurred after the initial stages of material discovery, allowing promising materials to be made in both higher quality and a more usable form. While this…

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Area Selective Deposition

Submission Deadline: August 24, 2022

The Journal of Vacuum Science and Technology A is soliciting research articles for a Special Topic Collection on Area Selective Deposition (ASD). This Collection will feature recent discoveries in fundamentals…

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Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE)

Submission Deadline: November 1, 2022

The Journal of Vacuum Science & Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). Each year,…

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Functional Coatings

Submission Deadline: November 15, 2022

This special collection will feature articles dedicated to the science, engineering, and technology of functional and multifunctional coatings which not only provide one basic characteristic (protection, optical, electrochemical, biomedical etc.)…

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Reproducibility Challenges and Solutions II with a Focus on Surface and Interface Analysis

Submission Deadline: February 1, 2023

Reliability and reproducibility of data and analysis issues are impacting most areas of modern science, including those of importance to the AVS. In 2020, JVST A published a special topic…

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Past Special Topics From Journal of Vacuum Science & Technology A

Atomic Layer Deposition and Atomic Layer Etching

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Reproducibility Challenges & Solutions

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Special Topic Collection Commemorating the Career of John Coburn

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Organic, Inorganic, and Hybrid Halide Perovskite Thin Films

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Area Selective Deposition

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Honoring Dr. Art Gossard’s 85th Birthday and his Leadership in the Science and Technology of Molecular Beam Epitaxy

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Atomic Layer Deposition and Atomic Layer Etching

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Gallium Oxide Materials and Devices

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Commemorating the Career of Charles S. Fadley

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Topological Materials

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Commemorating the Career of Pat Thiel

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Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

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Functional Coatings

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Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE)

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Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

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Gallium Oxide Materials and Devices

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Commemorating the Career of David Arthur Shirley

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