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  • Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A

JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.

Upcoming Special Topics From Journal of Vacuum Science & Technology A

Past Topics

Gallium Oxide Materials and Devices

Submission Deadline: March 7, 2023

This Special Topic Collection features articles on gallium oxide including fundamental research on the material as well as its applications in devices. Topics covered include but are not limited to…

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Papers from the 36th North American Conference on Molecular Beam Epitaxy (NAMBE 2022)

Submission Deadline: March 15, 2023

This collection will contain papers presented at the 36th North American Conference on Molecular Beam Epitaxy (NAMBE 2022), which was held September 18-21, 2022 in Rehoboth Beach, Delaware, as well…

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Reproducibility Challenges and Solutions II with a Focus on Surface and Interface Analysis

Submission Deadline: May 3, 2023

Reliability and reproducibility of data and analysis issues are impacting most areas of modern science, including those of importance to the AVS. In 2020, JVST A published a special topic…

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55 Years of Metalorganic Chemical Vapor Deposition (MOCVD)

Submission Deadline: July 26, 2023

Metal organic chemical vapor deposition (MOCVD) and related techniques are a mainstay of semiconductor synthesis, spanning arsenides, anitmonides, nitrides, and complex device stacks. More recently, MOCVD has been used to…

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Commemorating the Career of Fredrick J. Walker

Submission Deadline: August 28, 2023

This Special Collection focuses on advances and challenges in the synthesis and atomic-scale characterization of oxide thin films synthesized by molecular beam epitaxy. The goal of this special collection is…

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Celebrating the Achievements and Life of Joe Greene

Submission Deadline: October 30, 2023

This Special Topic Collection honors the seminal and interdisciplinary contributions of Professor Joe Greene to atomic level understanding and controlling of low-temperature film growth to synthesize novel metastable semiconducting layers…

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Past Special Topics From Journal of Vacuum Science & Technology A

Atomic Layer Deposition and Atomic Layer Etching

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Reproducibility Challenges & Solutions

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Special Topic Collection Commemorating the Career of John Coburn

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Organic, Inorganic, and Hybrid Halide Perovskite Thin Films

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Area Selective Deposition

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Honoring Dr. Art Gossard’s 85th Birthday and his Leadership in the Science and Technology of Molecular Beam Epitaxy

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Atomic Layer Deposition and Atomic Layer Etching

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Gallium Oxide Materials and Devices

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Commemorating the Career of Charles S. Fadley

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Topological Materials

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Commemorating the Career of Pat Thiel

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Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

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Functional Coatings

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Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE)

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Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

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Gallium Oxide Materials and Devices

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Commemorating the Career of David Arthur Shirley

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Atmospheric Plasma-Liquid Interfaces

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Thin Film Deposition for Materials Discovery

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Area Selective Deposition

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Functional Coatings

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Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE)

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