JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.
Metal organic chemical vapor deposition (MOCVD) and related techniques are a mainstay of semiconductor synthesis, spanning arsenides, anitmonides, nitrides, and complex device stacks. More recently, MOCVD has been used to…
This Special Collection focuses on advances and challenges in the synthesis and atomic-scale characterization of oxide thin films synthesized by molecular beam epitaxy. The goal of this special collection is…
This Special Topic Collection honors the seminal and interdisciplinary contributions of Professor Joe Greene to atomic level understanding and controlling of low-temperature film growth to synthesize novel metastable semiconducting layers…
The Journal of Vacuum Science & Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). These special…