JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.
This Special Collection focuses on important challenges, new developments, and current understanding in a wide range of topics including MBE technology, growth of semiconductors and related materials, devices enabled by…
The Journal of Vacuum Science and Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition and Atomic Layer Etching. Each year, the Journal…
This Special Topic Collection features articles on gallium oxide including fundamental research on the material as well as its applications in devices. Topics covered include but are not limited to…