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  • Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B

JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.

Upcoming Special Topics From Journal of Vacuum Science & Technology B

Past Topics
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Spotlight on Early-Career Breakthroughs in Nanotechnology

Submission Deadline: March 16, 2026

This Special Topic Collection will feature articles on all areas that fall within the scope of JVST B, authored or co-authored by early-career professionals, scientists, and engineers who are currently…

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Supply Chain Resilience for Semiconductor Devices and Manufacturing

Submission Deadline: December 7, 2026

This special topic collection highlights recent research, progress, and perspectives focused on supply chain and sustainability challenges in semiconductor device manufacturing. Topics covered include, but are not limited to: PFAS-free…

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