JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.
This Special Topic Collection features articles on the most recent developments and experimental studies in Secondary Ion Mass Spectrometry (SIMS). The collection includes papers presented at the SIMS 24 Conference…
Image Credit: Swarnav Mukhopadhyay, Hridibrata Pal, Sameer R. Narang, Chenyu Guo, Jichun Ye, Wei Guo, Biplab Sarkar, J. Vac. Sci. Technol. B, 39, 052206 (2021); https://doi.org/10.1116/6.0001196 This Special Topic Collection…
This Special Topic Collection is in conjunction with the 38th International Vacuum Nanoelectronics Conference (IVNC 2025), held in Reykjavik, Iceland from July 8-11, 2025. The Chair of the conference was…
This Special Topic Collection on Smart Sensors and Devices for Healthcare focuses on the latest advancements in sensor technologies and medical devices that leverage vacuum, nanotechnology, and advanced fabrication techniques.…
This special collection celebrates the career of Professor Jiro Matsuo of Kyoto University and his leadership in the fields of gas cluster ion beam technologies and Secondary Ion Mass Spectrometry…
This special topic collection includes papers presented during the AVS 71st International Symposium & Exhibition, which took place from September 21-26, 2025 in Charlotte, NC. The theme for AVS 71…