The Journal of Vacuum Science and Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition and Atomic Layer Etching.
Each year, the Journal of Vacuum Science and Technology A publishes collections of articles covering the most recent developments and experimental studies in ALD and ALE. The Collections feature articles dedicated to the science and technology of atomic layer controlled deposition and etching.
Topics covered include, but are not limited to:
- Atomic Layer Deposition (ALD)
- Thin films
- Atomic Layer Etching (ALE)
- Plasma processing
- Semiconductor device fabrication
- Materials treatment
Manuscript Details & Submission
Authors are encouraged to use the JVST article template. During submission, you will have an opportunity to indicate that your paper is a part of one of these collections by choosing either the Special Topic or Conference Collection on “Atomic Layer Deposition (ALD)” or “Atomic Layer Etching (ALE).”