Special Topic Collection Commemorating the Career of John Coburn

The Journal of Vacuum Science and Technology A is soliciting research articles and reviews for a Special Topic Collection Commemorating the Career of John Coburn. This Special Collection will focus on important challenges, new developments, and current understanding in a wide range of topics in Plasma Science and Technology and Plasma-Surface Interactions. Our goal is to offer the readers the newest, outstanding research in the many fields which John Coburn influenced and participated. The collection will cater to both scientists and professionals in industry while connecting fundamental research with practical applications. Online, you will have an opportunity to tell us that your paper is a part of the Special Topic Collection by choosing the “Special Topic Collection Commemorating the Career of John Coburn.”

Topics covered include, but are not limited to:

• Plasma Etching and Deposition
• Plasma Chemistry and Physics
• Plasma and Surface Diagnostics
• Plasma-Surface Interactions
• Plasma and Plasma Process Modeling

Guest Editors

Eray Aydil – New York University

David Graves – University of California, Berkeley