The focused ion beam (FIB) tool has enabled incredible applications over the past 45 years since its first invention. Most applications of FIB today rely on the use of FIB for material removal, such as FIB for micro-/nano-Secondary Ion Mass Spectrometry, Transmission Electron Microscope lamella preparation and microelectronic circuit edit. However, the nanoscale spot size of FIB combined with the ability of producing various ion species enables novel applications for defect engineering in solids. This special issue will highlight novel FIB enabled applications beyond material removal and will give a perspective of where FIB applications will be moving to in the future.
Topics covered include, but are not limited to:
- focused ion beam
- single photon emitter
- radiation effects
- radiation solid interactions
Michael Titze, Sandia National Laboratories
How to submit:
- Please submit through the online submission system.
- Under manuscript type → select “Article” or “Review”.
- Under manuscript information → Manuscript classification → select: “Novel Applications of Focused Ion Beams – Beyond Milling”