Piezoelectric Thin Films for MEMS
Recently, piezoelectric thin films have attracted considerable attention as one of the new key technologies for IoT related MEMS devices. The most popular piezoelectric thin films are PZT-based perovskite materials, however, because of the rapid progress of piezoelectric thin-film technologies, new candidates of piezoelectric thin films have been developed such as Sc-doped AlN and lead-free KNN thin films. These research results have also stimulated a wide range of related technologies concerning piezoelectric MEMS such as material science, deposition and measurement methods, device design, and micro-fabrication of piezoelectric MEMS devices. These technologies are based on the close relationship between academia and industries and the common goal is to contribute to society by creating new functional devices using piezoelectric thin films. This APL special topic provides a platform to examine emerging piezoelectric thin films and devices.
Topics covered include, but are not limited to:
- High performance thin films
- Multilayer, AlN and lead-free films
- Reliability and power handling of piezoelectric films
- New methods for characterization of piezoelectric films
- Damage-free approaches for microfabrication
- Innovation in device applications (e.g. medical imaging, energy harvesting, position sensing)
Guest Editors
Isaku Kanno, Kobe University
Barbara Malič, Jožef Stefan Institute
Jun Akedo, Advanced Industrial Science and Technology
Paul Muralt, École Polytechnique Fédérale de Lausanne (EPFL)
Jun Ouyang, Qilu University of Technology
Takeshi Yoshimura, Osaka Prefecture University