JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.
The Journal of Vacuum Science & Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). Each year,…
This Special Topic Collection features articles on gallium oxide including fundamental research on the material as well as its applications in devices. Topics covered include but are not limited to…
Phase change materials, including phase-transition materials and 2D phase change materials, undergo structural phase changes that are accompanied by significant alterations in electrical, optical, and thermal properties. They offer unique…
This Special Topic Collection features articles dedicated to the synthesis, processing, and integration of two-dimensional (2D) materials, including both elemental and compound layered materials. Topics covered include, but are not…
“Image Credit: Weiqian Zhu, Shanchen Wang, Zitian Zhao, Yunlong Li, Xiaofeng Li, and Jianhong Wang, J. Vac. Sci. Technol. A 43, 023105 (2025); https://doi.org/10.1116/6.000424“ Multi-principal element alloys, often referred to…
This Special Topic Collection will feature articles on all areas that fall within the scope of JVST A, authored or co-authored by early-career professionals, scientists, and engineers who are currently…