JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.
“Image Credit: Courtesy of Yuxiao Lan and Rong Chen. Background image from https://pixabay.com/illustrations/processor-cpu-computer-chip-2217771/“ This collection features recent discoveries in fundamentals of Area Selective Deposition (ASD) as well as advances in…
The Journal of Vacuum Science & Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). Each year,…
This special topic collection includes papers presented during the AVS 71st International Symposium & Exhibition, which took place from September 21-26, 2025 in Charlotte, NC. The theme for AVS 71…