JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas.
“Image Credit: Courtesy of Yuxiao Lan and Rong Chen. Background image from https://pixabay.com/illustrations/processor-cpu-computer-chip-2217771/“ This collection features recent discoveries in fundamentals of Area Selective Deposition (ASD) as well as advances in…
The Journal of Vacuum Science & Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). Each year,…
This special topic collection includes papers presented during the AVS 71st International Symposium & Exhibition, which took place from September 21-26, 2025 in Charlotte, NC. The theme for AVS 71…
Phase change materials, including phase-transition materials and 2D phase change materials, undergo structural phase changes that are accompanied by significant alterations in electrical, optical, and thermal properties. They offer unique…
“Image Credit: Weiqian Zhu, Shanchen Wang, Zitian Zhao, Yunlong Li, Xiaofeng Li, and Jianhong Wang, J. Vac. Sci. Technol. A 43, 023105 (2025); https://doi.org/10.1116/6.000424“ Multi-principal element alloys, often referred to…
This Special Topic Collection features articles on gallium oxide including fundamental research on the material as well as its applications in devices. Topics covered include but are not limited to…