JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.
This Special Topic Collection is devoted to achieving a fundamental understanding of the physical, chemical, biological, structural, optical, magnetic and electrical properties of surfaces and interfaces. These studies include novel…
This Special Topic Collection is in conjunction with the 39th International Vacuum Nanoelectronics Conference (IVNC 2026), held in Tokyo, Japan from July 13-17, 2026. The Chair of the conference was…
Vacuum science and technology underpin a vast range of modern scientific and industrial developments, from advanced thin‐film coatings and surface engineering to plasma processing and nanoscale device fabrication. Continuous advances…
This special topic collection highlights recent research, progress, and perspectives focused on supply chain and sustainability challenges in semiconductor device manufacturing. Topics covered include, but are not limited to: PFAS-free…
This special topic collection includes papers presented during the AVS 72nd International Symposium & Exhibition (November 8-13, 2026 in Pittsburgh, PA). The AVS Symposium is the premier venue for presenting…