JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.
Vacuum science and technology underpin a vast range of modern scientific and industrial developments, from advanced thin‐film coatings and surface engineering to plasma processing and nanoscale device fabrication. Continuous advances…
This special topic collection highlights recent research, progress, and perspectives focused on supply chain and sustainability challenges in semiconductor device manufacturing. Topics covered include, but are not limited to: PFAS-free…
This special topic collection includes papers presented during the AVS 72nd International Symposium & Exhibition (November 8-13, 2026 in Pittsburgh, PA). The AVS Symposium is the premier venue for presenting…