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  • Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B

JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.

Upcoming Special Topics From Journal of Vacuum Science & Technology B

Past Topics
Cover image for Journal of Vacuum Sciences & Technology B Volume 43, Number 3, May/June 2025

Spotlight on Early-Career Breakthroughs in Nanotechnology

Submission Deadline: June 9, 2026

This Special Topic Collection will feature articles on all areas that fall within the scope of JVST B, authored or co-authored by early-career professionals, scientists, and engineers who are currently…

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Surfaces, Thin Films, and Applications of Vacuum Technology at Mexican Institutions

Submission Deadline: July 13, 2026

This Special Topic Collection features articles on fundamental and applied research conducted at Mexican institutions. It presents current interests and capabilities in the fields of surfaces and interfaces, thin films,…

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Physics and Chemistry of Surfaces and Interfaces

Submission Deadline: October 1, 2026

This Special Topic Collection is devoted to achieving a fundamental understanding of the physical, chemical, biological, structural, optical, magnetic and electrical properties of surfaces and interfaces. These studies include novel…

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Vacuum Nanoelectronics

Submission Deadline: October 15, 2026

This Special Topic Collection is in conjunction with the 39th International Vacuum Nanoelectronics Conference (IVNC 2026), held in Tokyo, Japan from July 13-17, 2026. The Chair of the conference was…

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Vacuum Processes for Advanced Materials and Nanodevices: Insights from Indian Research Institutions

Submission Deadline: November 16, 2026

Vacuum science and technology underpin a vast range of modern scientific and industrial developments, from advanced thin‐film coatings and surface engineering to plasma processing and nanoscale device fabrication. Continuous advances…

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Supply Chain Resilience for Semiconductor Devices and Manufacturing

Submission Deadline: December 7, 2026

This special topic collection highlights recent research, progress, and perspectives focused on supply chain and sustainability challenges in semiconductor device manufacturing. Topics covered include, but are not limited to: PFAS-free…

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