JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.
This Special Topic Collection is in conjunction with the 34th International Vacuum Nanoelectronics Conference, IVNC 2021, being held virtually on July 5-9, 2021. This collection is devoted to the nanoscience…
Plasma processing is a critical tool for the microelectronics industry, whose products and systems enable technologies across a wide range of economic sectors, with plasmas used in 40-45% of the…