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  • Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B

JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology.

Upcoming Special Topics From Journal of Vacuum Science & Technology B

Past Topics

Secondary Ion Mass Spectrometry (SIMS)

Submission Deadline: February 10, 2023

This Special Topic Collection features articles on the most recent developments and experimental studies in Secondary Ion Mass Spectrometry (SIMS). The collection includes papers presented at the SIMS 23 Conference…

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Celebrating the Early Career Professionals Contributing to the Advancement of Microelectronics and Nanotechnology

Submission Deadline: April 19, 2023

The AVS Early Career Professionals Committee (ECPC) and The Journal of Vacuum Science & Technology B (JVST B) are planning a Special Topic Collection: Celebrating the Early Career Professionals Contributing…

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Physics and Chemistry of Surfaces and Interfaces

Submission Deadline: June 28, 2023

This Special Topic Collection is devoted to achieving a fundamental understanding of the physical, chemical, biological, structural, optical, magnetic and electrical properties of surfaces and interfaces. These studies include novel…

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55 Years of Metalorganic Chemical Vapor Deposition (MOCVD)

Submission Deadline: July 26, 2023

Metal organic chemical vapor deposition (MOCVD) and related techniques are a mainstay of semiconductor synthesis, spanning arsenides, anitmonides, nitrides, and complex device stacks. More recently, MOCVD has been used to…

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Past Special Topics From Journal of Vacuum Science & Technology B

SIMS

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Reliability and Stress-related Phenomena in Nano and Microelectronics

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Strain Engineering of Nanophotonic Devices

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Physics and Chemistry of Surfaces and Interfaces

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Vacuum Nanoelectronics

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Plasma Processing for Advanced Microelectronics

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Neuromorphic Materials, Devices, and Processing

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Vacuum Nanoelectronics

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Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

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